THE SYNTHESIS AND PROPERTIES OF FLUORINE-DOPED CEO_2 POWDERS: SIGNIFICANT CHANGE IN PARTICLE MORPHOLOGY AND THEIR IMPROVED CMP PERFORMANCE

摘要

CeO_2-based polishing powder has become one of the most promising polishing powders used in chemical mechanical polishing (CMP) industry. However, due to its high hardness, the as-obtained CeO_2 powders usually need further modifications, especially when polishing soft materials, such as fused quartz-based optical glass. In this work, we reported a novel fluorine doping strategy for the synthesis of CeO_2 powders with controllable morphologies and improved CMP properties. Cerium carbonate and fluorine hydride were used as the starting raw materials, and after that, they were milled and annealed at different temperature to get the desired powders. The results showed that for samples without F-doping, only rod-like CeO_2 powders with a minimum size of about 1.3μm were obtained at 800 ℃ for 2h. While for the fluorine doped samples, spherical grape-like CeO_2 with smaller sizes can be prepared. Further investigations indicated that the incorporation of fluorine and the significant change in the particle morphology improved the dispersivity and stability of the CeO_2 slurries, and a better CMP performance was achieved, which indicated that the current processing were of great potentials for the synthesis of high performance ceria-based slurries. This study was supported in part by funding from the China Postdoctoral Science Foundation (Contract No. 2012M521406), the Open Fund of Key Laboratory of Inorganic Coating Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences (Contract No. SKL201310SIC) and the Key Science and Technology Research Projects of Henan Provincial Education Department (Contract No.: 14B430023).