Indium tin oxide thin films by magnetron sputtering for telecom applications

摘要

In this paper, we investigate optical and electrical properties of Indium Tin Oxide (ITO) related to telecom applications in C-band, in particular referring to a Liquid Crystal on Silicon (LCOS) component, allowing tunability of a narrow-line external cavity laser (ECL). It will be experimentally demonstrated that it is possible to achieve nearly in target values for sheet resistivity and complex refractive index using magnetron sputtering deposition process, being temperature, oxygen partial pressure and Radio Frequency (RF) bias the most essential parameters.