The Design and Modelling of a GaAs-Based NEMS Vector Hydrophone

摘要

This paper reports a novel analytical modeling of a GaAs-based NEMS vector hydrophone based on resonant tunneling diode (RTD). The proposed hydrophone consists of four-beam micro-structure and rigidity plastic cylinder. The sensitive unit is the RTD piezoresistors which are located at the beams, and the sensing principle is based upon the acoustic theory of cylinder. To obtain an application specific optimum design parameters and predict the hydrophone performance ahead of actual fabrication, finite element modelling (FEM) was performed. The experiment results were given at last, the results showed that this kind of hydrophone possesses directional pattern in form of '8' shape, and can be used for obtaining vector information of underwater sound field.