Proton Conduction in Highly Textured Y:BaZrO3 and Y:BaZrCeO3 Thin Films Fabricated by Pulsed Laser Deposition

摘要

Highly textured BZY and BZCY films were fabricated on a single crystalline MgO(100) substrate by PLD under various deposition conditions including substrate temperature and target-to-substrate distance. The perovskite-type oxides, BaZr_(0.85)Y_(0.15)O_(3-δ) (BZY) and BaZr_(0.3)Ce_(0.55)Y_(0.15)O_(3-δ) (BZCY), were synthesized via a solid-state reaction method and sintered at 1680℃ to be used as targets for pulsed laser deposition (PLD). The structural properties of the films were analyzed by x-ray diffraction (XRD) and scanning electron microscopy (SEM). The electrical conductivities of the films were measured by the electrochemical impedance spectroscopy (EIS) method in the temperature range of 220-460℃.