Low cost and flexible data analysis system to find appropriate corrective action for yield deteriorations in LSI manufacturing

摘要

Shortening failure analysis TAT to find appropriate corrective action to resolve low yield problems is one of the most effective methods to improve profitability of LSI manufacturing. We have developed and are successfully using a low cost data analysis system for such purposes. Simple C-shell script programing and AWK programing were used for this development. These tools are so easy to handle that the user of the system, device engineers, were able to construct the system, which made the system friendly and easy to be modified.