SURFACE STRUCTURE DEPENDENCE OF IMPACT PROCESSES OF GAS CLUSTER IONS

摘要

Molecular dynamics simulations of Ar cluster impacting on Si surface with various surface structures were carried out. It was found that the surface morphology is dynamically deformed with only one cluster impact and the impact process of cluster is different depending on the local surface structure. The MD simulations of sequential impacts of large clusters were performed. It was found that the small tip structures on the surface could be removed easily with cluster irradiation. It was shown that surface roughness converges to 15～20A and this value agrees with the result obtained by single impact of cluster.