Synthesis of Cu(ln_(0.75)Al_(0.25))Se_2 Thin Films from Binary Selenides Powder Compacted Targets by Sputtering and Selenization

摘要

Cu(In_(0.75)Al_(0.25))Se_2 thin films were prepared using both one-step sputtering and two-stage process involving sputtering and selenization. Structure and properties of the films were analyzed and compared between the methods. All films had good adhesion to the substrate and showed strong (112), (220)/(204) peaks while minor secondary phase Cu_xSe was observed in the films from selenization. This paper compares the visibility of one step sputtering process and selenization of sputtered binary selenides layers to produce Cu(InAl)Se2 thin films (CIAS) for solar cell absorber applications. One step sputtering deposition from binary selenides powder compacted targets can produces CIAS films with better structural and optical properties compared to films produced by selenization of sputtered precursors.