Technology and Properties of CrN Films Deposited by Multi-Arc Ion Plating

机译：多弧离子镀CrN薄膜的工艺与性能

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摘要

CrN films were deposited using Multi Arc Ion equipment on M35 steel. The experiment results indicate that the flow ratio of N2 to Ar play an important role in the properties of films.

机译：使用多弧离子设备在M35钢上沉积CrN薄膜。实验结果表明，N2与Ar的流量比在薄膜的性能中起着重要的作用。

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来源
《International Nano-Optoelectronic Workshop; 20070729-0811; Beijing and Lanzhou(CN)》|2007年|P.336-337|共2页
会议地点 Beijing and Lanzhou(CN)
作者
Xiaoming Yao; Xiaoming Ling; Qi Jin; Duowang Fan;
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作者单位

Key Laboratory of Opto-Electronic Technology and Intelligent Control, Ministry of Education, Lanzhou Jiaotong University, Lanzhou 730070, People's Republic of China;

Key Laboratory of Opto-Electronic Technology and Intelligent Control, Ministry of Educati;

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正文语种 eng
中图分类半导体技术;
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2. 多弧离子镀制备的大厚度Cr/Cr2N/CrN多层涂层的结构和力学性能（英文） [J] . 单磊, 王永欣, 李金龙, 中国有色金属学报：英文版 . 2015,第004期
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6. Technology and Properties of CrN Films Deposited by Multi-Arc Ion Plating [C] . Yao, Xiaoming, Ling, . 2007

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Technology and Properties of CrN Films Deposited by Multi-Arc Ion Plating

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