Multilayered gradient CrN/ZrN coatings synthesized by magnetron sputtering

摘要

The multilayer gradient CrN/ZrN coatings were synthesized by a dual cathode DC magnetron sputtering. The influence of different species of reaction gases and partial pressures on structure and mechanical properties was investigated using XRD, AES, XPS, and nanoindentation. The results show that N_2-NH_3 mixture process gas is of benefit to the synthesis of superhard multilayered gradient CrN/ZrN coatings. The presence of the preferred orientations of CrN(111), (200) and ZrN (111), (220) in the structure is a main reason for superhardness of multilayered gradient coatings.