SCANNING PROBE MICROSCOPY APPLICATIONS TO CHARACTERIZATION IN MICROELECTRONICS

摘要

In this paper,we simply introduce the theory of Scanning Tunnelling Microscopy ( STM ) and Atomic Force Microscopy ( AFM ).Then we investigate the morphology and structure of read-only memory ( ROM ) in Ultra-Large-Scale-Integration ( ULSI ).Structural parameters of ROM,both horizontal and vertical,are measured precisely.Also,we put AFM into observation of polycrystalline silicon surface with cloud defect.By comparison,we also observed the surface of polycrystalline silicon without cloud defect.We found the cloud polycrystalline silicon surface was formed by pits with different sizes.But the normal polycrystalline silicon surface was not.Our experiments show that SPM is a powerful tool for characterization in microelectronics.