Role of Rapid Thermal Processing in the Development of Disruptive and Non-disruptive Technologies for Semiconductor Manufacturing in the 21st Century

摘要

In this paper we have analyzed the current and future prospects of RTP for semiconductor manufacturing. Current trends are in the direction of single wafer processing based manufacturing and RTP will play a very important role. We have pointed out the essential features that need to be introduced in the design of future RTP systems. Specifically, reduction of processing temperature, reduction of variance of critical device parameters and obtaining homogenous microstructures are the key issues for designing future RTP systems.