THE CHARACTERISTCS OF TiCrN FILM PREPARED BY THE DYNAMIC ION BEAM MIXING METHOD

摘要

TiCrN films for the seals used in rotating machinery have been developed by dynamic ion beam mixing (DM) process, which combines Ti and Cr vapor deposition with simultaneous nitrogen ion beam irradiation. The tribological properties of Ti_(1-x)Cr_xN films on AISI630 stainless steel (SS) were investigated for the seal materials of a steam turbine. In this study, composition and crystal structure were investigated by X-ray photoelectron spectroscopy and X-ray diffraction, respectively. Corrosion resistance of Ti_(1-x)Cr_xN films was investigated by the exposure in high-temperature steam. Wear resistance and frictional coefficient properties of Ti_(1-x)Cr_xN films on AISI630 SS paired with carbon were examined by the disk-on-disk sliding test in high-temperature steam, and compared with conventional TiN film. The results show that Cr content TiN films are superior to TiN films for wear resistance and friction properties in high-temperature steam.