Generating Mechanism of the Surface Micro-texture of Magnetic Disc Substrate in Polishing

摘要

Generating mechanism of the surface micro-texture of 3.5" magnetic disc substrate with plated NiP layer in polishing is analyzed in detail and the surface micro-texture of primary and polished substrate is observed by SEM. The results shows that (1) the surface roughness of the substrate is constructed by new scratches and primary texture that has been polished; (2) the polishing motion parameters have little effect on surface roughness except polishing grains size and pad material, and (3) surface roughness varies exponentially with polishing time and material removal depth.