Fabrication of a high-fill-factor microlens array using different thermal reflow process

摘要

Thermal reflow is widely used in the fabrication of microlenses as a simple and low-cost process, which includes thedirect contact heating and the upside-down reflow. To compare the difference in the shapes of the microlenses obtainedby these two approaches, the cylindrical microstructure arrays obtained rapidly via DMD-based lithography system wereused for different thermal reflow processes, and subsequently, two types of high-fill-factor microlens arrays (MLAs)were fabricated and measured in the experiment. Results indicate that the MLAs obtained by these two kinds of thermalreflow have different surface profiles, while these MLAs are good in surface quality because the profile curves of eachmicrolens are very similar and continuous. The comparison results provided in this paper can be used as a reference forselecting the appropriate thermal reflow process for fabrication of other microlenses.