FABRICATION METHOD OF MICROLENS ARRAY AND MICROLENS ARRAY THEREOF

摘要

The present invention discloses a fabrication method of a microlens array (MLA) and an MLA fabricated using the same. The fabrication method of an MLA comprises: providing a substrate with an interface hydrophilic modified polymer layer; using light, gas or liquid with the property of converting the polymer' hydrophilicity to create a hydrophilic zone on the interface hydrophilic modified polymer layer; coating the substrate with a liquid material to condense a plurality of liquid microlenses in the hydrophilic zone; and curing the plurality of liquid microlenses to form a plurality of microlenses. Therefore, the fabrication method of an MLA has advantages of fast speed, low cost, no etch transfer and low temperature.