Amorphous fluorocarbon polymer (a-C:F) films prepared in perfluorooctane (C_8F_(18)) vapor RF plasmas

摘要

Amorphous fluorocarbon polymer (a-C:F) films were prepared in perfluorooctane (C_8F_(18)) vapor RF plasma and their chemical properties were studied. The deposition rate from C_8F_(18) monomer reached 300 nm/min (200 nm/min from 10%Ar/C_8F_(18)). The fluorine to carbon ratio (F/C) in the film was between 1.57 and 1.75, and the cross-linking degree was between 35% and 39%.