Electromagnetic Wave Shielding Properties of ITO/PET Thin Film by Film Thickness

摘要

The thin films of indium tin oxide (ITO) are used for a variety of electronic devices such as solar cells, touch panels, liquid crystal displays (LCDs). However, these electronic devices are not strong enough against heavy impact since their ITO thin films are deposited on glass substrates. Therefore, ITO thin films were prepared by the inclination opposite target type DC magnetron sputtering equipment onto the Polyethylene Terephthalate (PET) substrate at room temperature using oxidized ITO with In_2O_3 and SnO_2 in a weight ratio of 9:1. In this study, the transmittance, resistivity and electromagnetic wave shielding effectiveness of the ITO thin films prepared at various sputtering time (20~80min namely film thickness; 130～500nm) are measured. The results show that transmittance of the ITO thin films could show about 70% in the range of a visible ray by the variation of film thickness. It also can be seen that a minimum exists in the resistivity of ITO thin films for the variation of film thickness. Electromagnetic wave shielding effectiveness was increased as film thickness increased.