Development of a universal calibration device for the depth measuring system in a nanoindentation instrument

摘要

In this investigation a combination of a differential interferometer and a confocal probe is proposed in order to measure small displacements of an object with large curvature. The arrangement avoids the disadvantages of a traditional interferometer application for the calibration of the depth measuring system in a nanoin dentation instrument. An experimental prototype based on the proposed interferometer was built. The first investigation results prove that the new interferometer can be successfully applied for the task to calibrate the depth measuring system of a nanoindentation instrument.