纳米压痕仪的压头面积函数校准方法的比较研究

摘要

基于原子力显微镜的直接测量法和通过熔融石英标准样块校准的间接测量法对纳米压痕仪的压头面积函数及机架柔度进行校准，并将这2种方法的校准结果分别应用到熔融石英和聚碳酸酯2种标准样块的压痕测试。压痕实验结果表明，在较浅压入深度，直接测量法测得的硬度值和折合模量值比间接方法测得的结果准确，在较大压入深度，2种方法的测量结果相差不大。%The indenter area function and the machine compliance of the instrumented nanoindentation are calibrated directly by atomic force microscope and indirectly by indentation of the standard fused silica,respectively. The calibration results of the two methods were applied to the indentations of the standard fused silica and the polycarbonate. The indentation results show,at low indentation depth,the hardness and the reduced modulus measured by the direct calibration method are more accurate than that of calibrated by the indirect method. However,the results of the two methods have small difference at high indentation depth.