Design and Fabrication of the Monolithic Inkjet Print Head

摘要

A monolithic inkjet print head was designed and fabricated with back shooting type of thermal bubble nucleation in this study. MEMS fabrication processes are applied to define the ink firing chamber, feed channel and the orifice plate within this new micro injector structure. In this study, printing resolution of this monolithic inkjet head is 600 dpi and the diameter of nozzle orifice is about 14 μm with thickness of 30 μm. Both the silicon dry and wet etching processes are applied to the fabrication of orifice plate with the control of thickness within ± 4 μm. The major advantage of this monolithic inkjet head is free of the assembly processes of inkjet device and the process throughput is improved. Operating frequency of the monolithic inkjet print head developed in this study is 19 KHz. By the optimization design of this monolithic inkjet print head could provide better printing quality than commercial ones.