A Novel Method for Forming Micron Scale Line Using Inkjet Technology

摘要

Producing of the interconnections or electronic devices by inkjet printing is processed with the advantage of direct writing, enhancement of expendable's utility rate and reducing the waste of substrate using. For the development of plastic electronic devices, shrinking of printed line width is an inevitable tendency. However, it is still tough to develop a specific print head in the application of jetting liquid droplet with diameter in nanometer scale nowadays. In order to solve the problems described above, the aim of this paper is to get a thinner line width by using "coffee ring" effect and the convective flow splitting effect, which occurred during solvent evaporating, and following by the etching step to make a thin printed line. With scale down of the inkjet head, change of the ink recipe and process recipe, it is able to gain the narrower line width. In this paper, a fine line with 8 μm in width had been demonstrated and printed by using the ordinary print head with orifice diameter of 65 μm.