首页> 外文会议>International Autuman Meeting on Gettering and Defect Engineering in Semiconductor Technology;GADEST; 20071014-19;20071014-19; Erice(IT);Erice(IT) >Impact of NiSi_2 precipitates electronic structure on the minority carrier lifetime in n- and p- type silicon
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Impact of NiSi_2 precipitates electronic structure on the minority carrier lifetime in n- and p- type silicon

机译:NiSi_2的影响沉淀了电子结构对n型和p型硅中少数载流子寿命的影响

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Minority carrier diffusion lengths were measured for the set of n- and p-type silicon samples with NiSi_2 precipitates of different electronic structure. We found that the type of precipitate electronic states in the upper part of band gap had no influence on the recombination activity of NiSi_2 precipitates. Minority carrier diffusion length L was found to be related to the precipitate density N and L ~ 2 × N ~(1/3) for n-type Si samples and L ~ 1 × N~(-1/3) for p-Si samples. Hydrogenation of the p-type Si sample with nanoscale nickel silicide precipitates resulted in an increase of the L value up to a factor of 3, while in n-Si L remained practicaly the same. The only hole emission in the samples of both conductivity types was detected in MCTS measurements and the cross section for the hole capture with the electronic states of the precipitaes was estimated to be as large as 10~(11) cm~(-2).
机译:测量了具有不同电子结构的NiSi_2沉淀的n型和p型硅样品的少数载流子扩散长度。我们发现带隙上部的沉淀电子态对NiSi_2沉淀的复合活性没有影响。发现少数载流子扩散长度L与n型Si样品的沉淀密度N和L〜2×N〜(1/3)和p-Si的L〜1×N〜(-1/3)有关。样品。用纳米级硅化镍沉淀物对p型Si样品进行加氢会导致L值增加至3倍,而在n-Si中L实际上保持不变。在MCTS测量中检测到两种导电类型的样品中唯一的空穴发射,并且具有沉淀物的电子态的空穴俘获截面估计为10〜(11)cm〜(-2)。

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