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Mathematical Model for Touching of Spherical Probe and Complex Measured Surface at CMMs

机译:三坐标测量机中球形探针和复杂被测表面接触的数学模型

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To measure complex surfaces, a wide application was made of Coordinate Measuring Machines that use the contact method. The first task in the measurement is to determine the coordinates of the sensor contact point and the surface. The touch sensor locks the coordinates of the center of the spherical probe at the moment of contact with the surface. However, the coordinates of the contact point on the probe's sphere are based on the calculation of the nominal surface. Two basic methods of calculation are known. The first method is to find the normal to the nominal surface that passes through the center of the sphere. This method is the simplest and is used to compensate the probe radius when measuring elementary surfaces or with a small number of control points. The second method uses the normals to the equidistant surface obtained at the centers of the spherical probe. This method is used when scanning a surface or in the absence of a CAD model. The accuracy of determining the point of contact is influenced by the accuracy of the size and shape of the spherical probe. Therefore, a new mathematical model is proposed that takes into account the geometry of the sphere of the probe. The idea is that the probe area is calibrated to fit the shape and creates its 3D model. For this it is proposed to use the Scanning probe microscopy, in particular, an atomic-force microscope. The calculation of the contact point is realized by a numerical algorithm according to which the point on the sphere is located with the minimum distance to the nominal surface in the direction of the normal. The presented algorithm has good convergence even when using a large number of points on the sphere. The check of the developed algorithm for measuring the rolling bearing parts in comparison with the standard method showed a 9% decrease in the measurement error.
机译:为了测量复杂的表面,使用接触法的坐标测量机得到了广泛的应用。测量的首要任务是确定传感器接触点和表面的坐标。接触表面时,接触式传感器会锁定球形探针中心的坐标。但是,探针球体上的接触点的坐标基于公称表面的计算。已知两种基本的计算方法。第一种方法是找到穿过球体中心的名义表面的法线。此方法是最简单的方法,用于在测量基本表面或带有少量控制点时补偿探针半径。第二种方法使用在球形探针中心获得的等距表面的法线。在扫描表面或没有CAD模型时使用此方法。确定接触点的精度受球形探针尺寸和形状的精度影响。因此,提出了一种新的数学模型,该模型考虑了探针球体的几何形状。想法是,将探针区域校准为适合形状并创建其3D模型。为此,建议使用扫描探针显微镜,特别是原子力显微镜。接触点的计算是通过数值算法实现的,根据该算法,球体上的点位于法线方向上与标称曲面的最小距离。即使在球上使用大量点时,所提出的算法也具有良好的收敛性。与标准方法相比,对开发的用于测量滚动轴承零件的算法的检查表明,测量误差降低了9%。

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