Challenges of Next Generation CVD For TFT-LCD Fabrication

摘要

As the market for large size TV with TFT-LCD screen is expected to grow fast from 2005, response from process equipment providers to enable cost effective tools with enhanced performance from previous generation systems. AKT proposes AKT-25K PECVD (Plasma Enhanced Chemical Vapor Deposition) as CVD solution for Gen 6 TFT-LCD manufacturing line.