High Sensitivity Flat Field Emitter Array Image Sensor — New Application of Field Emitter Arrays —

摘要

A new type of flat image sensor consisting of a field emitter array (FEA) and a highly sensitive avalanche-mode photoconductive film is proposed. An experimental vacuum-packaged sensor with 128 x 96 pixels was fabricated and tested. Experimental results showed that the prototype could operate stably as a highly sensitive image sensor having both sufficient resolution corresponding to the number of pixels and a wide dynamic range. The prototype therefore demonstrated its potential as a next-generation image sensor and offered a new application for FEAs.