Robust and Flexible Thermal Sensor Using the 3-Omega-Method to Investigate Thermal Properties of Fluids

摘要

This paper presents a platinum thin film sensor able to investigate the thermal properties of a fluid whereas the sensing element is protected against corrosion by an intermediate stainless-steel wall. Progress claims include: 1) the 3-omega method is applied to investigate fluids which are not directly adjacent to the sensitive layer, 2) the 3-omega-method is applied for a meander structure, 3) a theoretical model is developed and agrees well with the experiment. These findings can have a key role for future stand-alone sensors measuring thermal parameters, or for sensors which combine several measurement principles, e.g. the 3-omega method for thermal parameter detection and the thermal flow meters for flow speed measurements.