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Lumped Element Model for CMUTs­Based Biochemical Resonant Sensor

机译:基于CMUTs的生化共振传感器的集总模型

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摘要

Lumped element model (LEM) for resonant chemical sensors based on the capacitive micromachined ultrasonic transducers (CMUTs) was developed and analyzed with electrical characterization. The CMUTs chip were functionalized with the electrospinning technology. Two Butterworth Van-Dyke (BvD) models for functionalized CMUTs were proposed and analyzed with different DC voltages. Considering the electrical phase with parasitic capacitance, the modified BvD model can be used to illustrate more comprehensive features for both mechanical impedance and phase properties. The parallel capacitance was measured accurately using an impedance analyzer, and the quality factor was calculated based on the proposed model under different DC voltages. These models will provide important theoretical basis for CMUTs-based chemical sensors to further electrical analysis and oscillator design.
机译:开发了基于电容微机械超声换能器(CMUT)的谐振化学传感器的集总模型(LEM),并进行了电学表征。 CMUTs芯片通过静电纺丝技术实现了功能化。提出了两种用于功能化CMUT的Butterworth Van-Dyke(BvD)模型,并在不同的直流电压下进行了分析。考虑到具有寄生电容的电相位,修改后的BvD模型可用于说明机械阻抗和相位特性的更全面的特征。使用阻抗分析仪精确测量并联电容,并根据所提出的模型在不同的直流电压下计算品质因数。这些模型将为基于CMUT的化学传感器进一步进行电分析和振荡器设计提供重要的理论基础。

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