Edge Placement Error and Line Edge Roughness

摘要

The aim of this work is to clarify the quantitative relationship between the Edge Placement Error (EPE) and Line EdgeRoughness (LER) in a rough pattern. Using a computational modelling approach to isolate this relationship, we show thatdespite the dominant role of Rms(LER), EPE is also affected by the correlation length especially at long length of interests.Similarly, we demonstrate and quantify the positive correlation of the edge correlation coefficient with Image PlacementError. The ultimate concern is to get design-rule determinations based on EPE definitions and characterization which isinformed by modern manufacturing and metrology aspects of LER.