Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;
Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;
Boron nitride; Chemical vapor deposition; Deposition mechanism; Thermodynamics; Kinetics;
机译:沉积温度对低压化学气相沉积法从SiCl4-BCl3-NH3-H-2-Ar混合物中沉积氮化硼硅的动力学和机理的影响
机译:等离子体压缩化学气相沉积制备立方晶氮化硼薄膜中残余压缩应力引起的六方氮化硼红外吸收频移
机译:等离子体压缩化学气相沉积制备立方晶氮化硼薄膜中残余压缩应力引起的六方氮化硼红外吸收频移
机译:通过低压化学气相沉积在650-1200℃下进行氮化硼的研究
机译:氮化铝和氮化硅的低温热化学气相沉积和催化化学气相沉积
机译:大气压化学气相沉积法连续生长六方石墨烯和氮化硼平面异质结构
机译:氮化硅和氮氧化硅层的低压化学气相沉积及其在基于光波导的化学传感器中的应用