Voice coil manipulator is widely used in modern industry. Due to its direct drive actuation characteristic, it can provide fast and accurate motions. In semiconductor manufacturing and packaging industry, accurate positioning and fast operating speed are essential criteria in ensuring production rate and product quality. Position accuracy and travelling speed are two conflicting requirements, and a compromise between them is required. To realise a high performance manipulator for accurate positioning necessitates the use of intelligent variable-speed drives with power electric actuators and advanced control algorithms.
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