Composition, structure and properties of homogenous (Ti_xZr_1-x)N coatings by multi-arc ion plating

摘要

Homogenous (Ti_xZr_1-x)N coating with different atomic ratios of Ti:Zr were deposited on the substrate of high speed steel by multi-arc plating in this paper. Their crystallographic characterization and compositions were investigated, micro-hardness, cohesion and fracture toughness were also studied. (Ti_xZr_1-x)N coatings mainly consisted of face-center cubic TiN. (Ti_xZr_1-x)N coatings consisted of mixed crystals of ZrN, TiN, Ti,Zr)N, (Zr,Ti)N phases. The coatings possessed high micro-hardness and varied little with the ratios of Ti:Zr. High hardness and brittleness result in poor adhesion with the substrate. The resutl of sliding wear test shows that (Ti_xZr_1-x)N coatings possessed better sliding wear resistance than TiN coating.