Application of Femtosecond Laser in Micro/Nano Machining

摘要

Although a variety of techniques exist in the microano fabrication field, femtosecond laser microano machining has attracted significant attention. Due to its unique features such as extremely short pulse duration, ultra high intensity, and nonlinear absorption, it is envisioned that femtosecond laser will become a prominent industrial r technique for production of microano parts and components. In this paper, we first give a review in the area of microano fabrication with a special focus on femtosecond laser microano machining. We then present some of econd our work in micromachining using a femtosecond laser with one specific application in metal cutting.