Fabrication of Chalcogenide Microlens Array Using Hot Embossing Method

摘要

Hot Embossing method has been proved to be an effective way to fabricate chalcogenide microlens array for optical applications in this paper. A photoresist master mold is prepared using the traditional lithography and thermal reflow method, and the negative replica of the master mold is fabricated using polydimethylsiloxane, which serves as the stamp for hot embossing. After heated above the glass transition temperature of the chalcogenide glass with some pressure, patterns on the stamp can be transferred into the surface of the glass. Chalcogenide microlens array with desired parameters is fabricated and characterized.