Direct-write printing of an RF-MEMS Cantilever

摘要

This paper presents the manufacturing of a simple RF MEMS cantilever ohmic contact switch using only a custom made silver nanoparticulate ink and PMMA [poly(methyl methacrylate)]. The manufacturing is additive in nature and only the PMMA layer is subtractive. The MEMS switch is printed on Kapton substrate using an Optomec Aerosol Jet printer. Then, it is cured at 200°C. Finally it is soaked in chloroform to remove the PMMA layer and complete the process. The printed MEMS were tested successfully and results are presented here.