Design and analysis of serpentine meander asymmetric cantilever RF-MEMS shunt capacitive switch

摘要

In this paper, the design of asymmetric cantilever radio frequency micro electromechanical system (RF-MEMS) capacitive shunt switch is presented. The analysis and design have considered for single meander, uniform serpentine and non-uniform serpentine asymmetric cantilever RF-MEMS capacitive shunt switches were proposed. The non-uniform serpentine meander cantilever structure shows better performance compared to other structures. The actuation voltage attained for the serpentine meander cantilever is 1.1 V, 3.2 V with the spring constants 0.03 N m, 0.32 N m for the left and right cantilevers respectively. The proposed model isolations observed in-off states at left, right and both side cantilevers are - 52 dB, - 61 dB, - 45 dB at frequency of 7 GHz, 11.1 GHz, 12 GHz respectively. The proposed device insertion loss is - 0.2 dB and return loss is - 44 dB over 12 GHz is observed at on-state of the proposed model. The performance parameters are also observed for spring constant, pull in voltage, quality factor, stress analysis, switching time, resistance, inductance, capacitance, stiction loss and variation of gap with respect to spring constants and actuation voltages are calculated and analysed.