The authors report an extension of a stochastic algorithm forcapacitance extraction in complex two- and three-dimensionalmultidielectric structures. The algorithm has applications in the areaof circuit modeling of multichip modules. The extension is in the formof a simple probability rule that depends on the ratio of electricpermittivities across dielectric interfaces. Computational results arepresented for a two-dimensional cross-section of a wire running over adielectric and ground plane. Results are also presented for athree-dimensional interconnect via partially embedded in a dielectricover a ground plane. All computations were performed on a personalcomputer. Execution times were nominally five minutes for statisticalerrors ranging from one to ten percent, depending on dimensionality andvalue of the dielectric constant. An extraction methodology was devisedfor large conductor arrays based on superimposing a geometrical hashinggrid
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