Holographic apparatus for forming nanograting device

摘要

This paper studies the fabrication of the nano-scale grating using laser beam interference. The beams come from a He-Cd laser @442nm were interfered with each other inside a prism, and form the interference pattern on the photoresist layer that coated on the bottom of the prism. The method can fabricate gratings with period that less than the half of the wavelength of the interference laser beam. It becomes a promising process that can fabricate a grating with periods of 160nm without using UV light source. The experimental result is also demonstrated.