Micro-optical structure for wave aberration compensation of optical systems

摘要

A wave aberration compensation method for optical system and human eyes has been studied. The wave distortion of the human eye can be measured using a Shack-Hartmann sensor and described in an eight-order Zernike polynomial. By picking up the higher order's terms of the wave aberration from the measured polynomial, characteristics of the higher order wave aberration were analyzed and concluded. The conjugate phase plates were designed based on the distribution of the single and the overall wave aberration of the eye. The thermal-filtered halftone mask technique is developed to manufacture such an abnormity micro-optical structure. The compensators for the single or the overall wave aberration were fabricated respectively. The relief profiles were evaluated using both three-dimensional profiler and interferometer. A primary experiment for compensating the higher-order wave aberration of an artificial eye was demonstrated.