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High-contrast grating MEMS optical phase-shifters for two-dimensional free-space beam steering

机译:用于二维自由空间光束转向的高对比度光栅MEMS光学移相器

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摘要

We report an optical phased array (OPA) for two-dimensional free-space beam steering. The array is composed of tunable MEMS all-pass filters (APFs) based on polysilicon high contrast grating (HCG) mirrors. The cavity length of each APF is voltage controlled via an electrostatically-actuated HCG top mirror and a fixed DBR bottom mirror. The HCG mirrors are composed of only a single layer of polysilicon, achieving >99% reflectivity through the use of a subwavelength grating patterned into the polysilicon surface. Conventional metal-coated MEMS mirrors must be thick (1-50 μm) to prevent warpage arising from thermal and residual stress. The single material construction used here results in a high degree of flatness even in a thin 350 nm HCG mirror. Relative to beamsteering systems based on a single rotating MEMS mirror, which are typically limited to bandwidths below 50 kHz, the MEMS OPA described here has the advantage of greatly reduced mass and therefore achieves a bandwidth over 500 kHz. The APF structure affords large (~2π) phase shift at a small displacement (< 50 nm), an order-of-magnitude smaller than the displacement required in a single-mirror phase-shifter design. Precise control of each all-pass-filter is achieved through an interferometric phase measurement system, and beam steering is demonstrated using binary phase patterns.
机译:我们报告了二维自由空间光束转向的光学相控阵(OPA)。该阵列由基于多晶硅高对比度光栅(HCG)镜的可调谐MEMS全通滤波器(APF)组成。每个APF的腔长通过静电驱动的HCG顶镜和固定的DBR底镜进行电压控制。 HCG反射镜仅由单层多晶硅组成,通过使用在多晶硅表面构图的亚波长光栅,可以实现> 99%的反射率。常规的金属镀膜MEMS反射镜必须很厚(1-50μm),以防止由于热应力和残余应力而引起的翘曲。即使在薄的350 nm HCG反射镜中,此处使用的单一材料结构也可以实现高度的平坦度。相对于基于单个旋转MEMS镜的光束转向系统(通常限于50 kHz以下的带宽),此处描述的MEMS OPA具有质量大大降低的优势,因此可实现500 kHz以上的带宽。 APF结构在较小的位移(<50 nm)下提供大的(〜2π)相移,其幅度比单镜移相器设计所需的位移小。通过干涉相位测量系统可实现对每个全通滤波器的精确控制,并使用二进制相位模式演示了光束转向。

著录项

  • 来源
    《High contrast metastructures III》|2014年|89950Q.1-89950Q.8|共8页
  • 会议地点 San Francisco CA(US)
  • 作者单位

    Department of Mechanical and Aerospace Engineering, University of California at Davis, Davis, California 95616, United States;

    Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, United States;

    Department of Mechanical and Aerospace Engineering, University of California at Davis, Davis, California 95616, United States;

    Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, United States;

    Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, United States;

    Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, United States;

    Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, United States;

    Department of Mechanical and Aerospace Engineering, University of California at Davis, Davis, California 95616, United States;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    optical phased arrays; beam steering; micro electro mechanical systems; high contrast gratings; Gires-Tournois etalon; all-pass filters;

    机译:光学相控阵;光束转向微机电系统;高对比度光栅; Gires-Tournois标准具;全通滤波器;
  • 入库时间 2022-08-26 13:45:40

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