Engineering of Angular Dependence of High-contrast Grating Mirror for Transverse Mode Control of VCSELs

摘要

We present our recent activity on highly angular-dependent high contrast grating (HCG) for the transverse mode control of VCSELs. The modeling and the experiment show the design flexibility of HCG to manage the angular dependence of HCG. The optimized angular dependent HCG functions as a spatial frequency filter. We are able to use the engineered angular dependence of HCG for the transverse-mode control of VCSELs by filtering out high-order transverse-modes. We fabricated and characterized amorphous Si HCG mirrors, which clearly show the large angular dependence. We demonstrated single-mode 980nm VCSELs with a HCG mirror functioning as a spatial frequency filter.