首页> 外文会议>Fundamental research in electrical engineering >Improve the Reliability and Increased Lifetime of Comb Drive Structure in RF MEMS Switch
【24h】

Improve the Reliability and Increased Lifetime of Comb Drive Structure in RF MEMS Switch

机译:提高RF MEMS开关中梳状驱动结构的可靠性并延长其使用寿命

获取原文
获取外文期刊封面目录资料

摘要

This paper presents a novel electrostatic comb-drive RF MEMS switches for the purpose of increasing reliability of micro-electromechanical switches, some new designs analyzed for elimination of adhesion, friction and dielectric charging in non-contact switches, targeted to decrease electrostatic force and applied voltage in the comb driven structure. The reason of this choice is simple manufacturing process (1 or 3 masking) compared to the other MEMS structures, ability to build with more material, linear functioning without static spring fingers, wide applications in addition to switches, such as Resonators, micro-filters, gyroscopes, accelerometers etc.
机译:本文提出了一种新型的静电梳状驱动RF MEMS开关,旨在提高微机电开关的可靠性,分析了一些新设计以消除非接触式开关中的粘附力,摩擦力和电介质电荷,旨在降低静电力并应用于梳齿驱动结构中的电压。与其他MEMS结构相比,这种选择的原因是制造工艺简单(1或3个掩膜),能够用更多的材料制造,没有静态弹簧指的线性功能,除了开关(例如谐振器,微滤波器)以外的广泛应用,陀螺仪,加速度计等

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号