首页> 外文会议>Fourth International Conference on Single Crystal Growth and Heat amp; Mass Transfer (ICSC - 2001) Vol.1; Sep 24-28, 2001; Obninsk, Russia >MECHANISM AND GROWTH KINETICS OF THIN POLYCRYSTALLINE FILMS OF COPPER, NICKEL, TITANIUM AND ZIRCONIUM OXIDES
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MECHANISM AND GROWTH KINETICS OF THIN POLYCRYSTALLINE FILMS OF COPPER, NICKEL, TITANIUM AND ZIRCONIUM OXIDES

机译:铜,镍,钛和锆氧化物薄多晶膜的形成机理和生长动力学

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摘要

The main regularities of formation of the oxides on the surface of metal films obtained by magnetron deposition of the corresponding materials on single-crystalline silicon have been investigated. Some specific features of the growth for oxide coatings were found with the account of possible self-organization of transition layers at the interphase boundary.
机译:研究了在单晶硅上通过磁控管沉积相应材料而获得的金属膜表面氧化物形成的主要规律。由于相间边界处过渡层可能自组织,因此发现了氧化物涂层生长的某些特定特征。

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