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Thermal stress minimization in optical components coated with Ge-As-Se films

机译:涂有Ge-As-Se薄膜的光学组件中的热应力最小化

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Abstract: Shear moduli for (As$-2$/Se$-3$/)$-1$MIN@y$/ Ge$-y$/(0$LSEQ@y$LSEQ@0.3$/), (As$-2$/Se$-3$/)$- 1$MIN@y$/(Ge$-2$/Se$-3$/)$-y$/ (0$LSEQ@y$LSEQ@v1) glasses have been calculated by the linear combination of atomic orbitals method. Linear thermal expansion coefficients for As$-2$/Se$-3$, (As$-2$/Se$-3$/)$-0.9$/Ge$-0.1$/, (As$- 2$/Se$-3$/)$-0.7$/Ge$-0.3$/ and Ge$-33$/As$-12$/Se$-55$/ films have been derived from thermal stress measurements. Correlation between theoretical and experimental thermal stress values for amorphous films has been made. The availability of the total stress minimization in multilayer structures based on the films under consideration has been shown. !12
机译:摘要:(As $ -2 $ / Se $ -3 $ /)$-1 $ MIN @ y $ / Ge $ -y $ /(0 $ LSEQ @ y $ LSEQ @ 0.3 $ /)的剪切模量,(As $ -2 $ / Se $ -3 $ /)$-1 $ MIN @ y $ /(Ge $ -2 $ / Se $ -3 $ /)$-y $ /(0 $ LSEQ @ y $ LSEQ @ v1 )玻璃是通过原子轨道的线性组合方法计算的。线性热膨胀系数为As $ -2 $ / Se $ -3 $,(As $ -2 $ / Se $ -3 $ /)$-0.9 $ / Ge $ -0.1 $ /,(As $ -2 $ /从热应力测量中得出了Se $ -3 $ /)$-0.7 $ / Ge $ -0.3 $ /和Ge $ -33 $ / As $ -12 $ / Se $ -55 $ /膜。已经建立了非晶膜的理论和实验热应力值之间的相关性。已经显示出基于所考虑的膜的多层结构中的总应力最小化的可用性。 !12

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