Chemical characterization of SiO_2:TiO_2 waveguide films using Auger Electron Spectroscopy

摘要

The aim of the work is to apply the Auger Electron Spectroscopy to determine the chemical composition and uniformityof silica-titania SiO_2:TiO_2 waveguide films which were fabricated via sol-gel method. The SiO_2:TiO_2 waveguide layersare routinely produced on glass substrates, however, for the research presented in the paper, they were made on siliconsubstrates. We registered series of 50 Auger spectra on the different depths in the structure. The result show that thestructure is chemically and structurally uniform through the whole depth.