Excimer laser deposition and characterization of tin and tin-oxide films

摘要

Abstract: ArF excimer laser deposition of tin and tin-oxide films on Si was obtained dissociating tetramethyltin Sn(CH$-3$/)$-4$/(TMT) and TMT/N$-2$/O mixtures. Information on the gas phase photoproducts was achieved by spontaneous emission spectroscopy. Electronically excited CH and Sn fragments were detected and their formation and decay mechanisms investigated through spectral and temporal analysis of the fluorescence signal. The effect of buffer gases on the emission characteristics was also studied.!