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A method for making a thin film by pulsed excimer laser deposition

机译:通过脉冲准分子激光沉积制造薄膜的方法

摘要

(57) a thin film of superconducting material by depositing on a substrate of the cloud and to generate a cloud of target material to bombard the target which is heated by radiation from [Abstract] pulsed high energy UV laser Method for manufacturing is disclosed.
机译:(57)公开了一种超导材料的薄膜,该薄膜通过沉积在云的基底上并产生靶材料的云来轰击由[摘要]脉冲高能UV激光的辐射加热的靶,其制造方法。

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