Abstract: At Laser-Laboratorium Gouttingen, damage and durability tests are performed on excimer laser optics. Within the automated experimental set-up, image processing techniques are applied for both spatial laser beam profiling in the target plane and real-time damage recognition. Along with a description of experimental details, results of damage threshold measurements at 248 nm and 193 nm are presented which demonstrate a strong relationship between absorption of laser radiation on defect sites and the subsequent damaging process. In addition, the influence of surface quality as well as laser pulse length on damage thresholds of fused silica substrates has been investigated.!
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