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Optical component used as a coupling window, rear window, coupling mirror or beam divider in a gas discharge laser, especially an excimer laser comprises a quartz-calcium fluoride combination or a quartz-magnesium fluoride combination
Optical component used as a coupling window, rear window, coupling mirror or beam divider in a gas discharge laser, especially an excimer laser comprises a quartz-calcium fluoride combination or a quartz-magnesium fluoride combination
Optical component comprises a quartz-calcium fluoride combination or a quartz-magnesium fluoride combination. Preferred Features: The quartz material is coated on the surface which is not in contact with the laser gas. The surfaces of the calcium fluoride or magnesium fluoride material are coated.
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