Development and Investigation of a Calibration Method for the Depth Measuring System of a Nanoindentation Instrument

摘要

Within nanotechnology the nanoindentation method developed to an indispensable tool of quality assurance. This method enables to determine the mechanical properties of thin layers. For a high quality of these layers the calibration of the nanoindentation instruments is necessary. The calibration of the depth measuring system in nanoindentation instruments is especially important. The paper reports about the development, investigation and results of a calibration method for the depth measuring system of a nanoindentation instrument. As calibration device a multi-pass plane mirror laser interferometer with sub-nanometric capability is used. The calibration set-up and the measures applied in order to eliminate or to avoid environmental disturbances are discussed.