Advanced Design Principles to Develop Nanopositioning Machines

摘要

Nano Positioning machines (NPM) are ultra-precise multi-axis positioning devices with a positioning uncertainty of a few nanometres. In the development process of a large-travel 3-axis NPM appropriate design principles have to be applied. Already in the conceptual design phase, the machine structure must be generated considering fundamental design principles. Here, errors and error sources can be detected by virtual prototyping techniques in the early stages of the design process. Working on this abstract machine structure level helps to face negative influences by heat, vibration, friction, forces and other effects. During the refinement process, design principles also need to be applied in another scale generating the concrete machine design. This also concerns mechanical interfaces, which have a big influence on the machine performance. In this paper the most important design principles are discussed and illustrated by means of examples.